Application of diffractive optical elements in laser metrology

被引：2

作者：

Poleshchuk, AG ^{[1
]}

Koronkevich, VP ^{[1
]}

Korolkov, VP ^{[1
]}

Sedukhin, AG ^{[1
]}

机构：

[1] Russian Acad Sci, Siberian Branch, Inst Automat & Electrometry, Novosibirsk 630090, Russia

来源：

SEVENTH INTERNATIONAL SYMPOSIUM ON LASER METROLOGY APPLIED TO SCIENCE, INDUSTRY, AND EVERYDAY LIFE, PTS 1 AND 2 | 2002年 / 4900卷

关键词：

diffractive optical elements; optical testing; circular laser writing system; angular encoder; interferometers;

D O I：

10.1117/12.484470

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Laser metrology often requires the precision forming of a probe laser beam with necessary wavefront shape or given intensity distribution. This problem is solved optimally by application. of diffractive optical elements (DOE). In the IA&E SB RAS a circular laser writing system (CLWS) was created for high precision DOE fabrication. This system allows to fabricate arbitrary DOEs with minimum feature sizes below 0.6 mum and the radial position accuracy of about 0.1 mum over 300 min substrates. The investigations carried out have confirmed promising prospects of application of high precision DOEs fabricated with the help of CLWS for solving various metrological problems.

引用

页码：841 / 852

页数：12

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