Application of diffractive optical elements in laser metrology

被引:2
|
作者
Poleshchuk, AG [1 ]
Koronkevich, VP [1 ]
Korolkov, VP [1 ]
Sedukhin, AG [1 ]
机构
[1] Russian Acad Sci, Siberian Branch, Inst Automat & Electrometry, Novosibirsk 630090, Russia
关键词
diffractive optical elements; optical testing; circular laser writing system; angular encoder; interferometers;
D O I
10.1117/12.484470
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Laser metrology often requires the precision forming of a probe laser beam with necessary wavefront shape or given intensity distribution. This problem is solved optimally by application. of diffractive optical elements (DOE). In the IA&E SB RAS a circular laser writing system (CLWS) was created for high precision DOE fabrication. This system allows to fabricate arbitrary DOEs with minimum feature sizes below 0.6 mum and the radial position accuracy of about 0.1 mum over 300 min substrates. The investigations carried out have confirmed promising prospects of application of high precision DOEs fabricated with the help of CLWS for solving various metrological problems.
引用
收藏
页码:841 / 852
页数:12
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