Effect of applied magnetic field on anodic oxidization of aluminum for high-aspect-ratio microfabrication

被引：3
|
作者：
Takezawa, M.
Imagawa, T.
Yamasaki, J.
Yagi, M.
机构：
[1] Kyushu Inst Technol, Grad Sch Engn, Dept Appl Sci Integrated Syst Engn, Kitakyushu, Fukuoka 8048550, Japan
[2] Sojo Univ, Energy Elect Lab, Kumamoto 8060082, Japan
来源：
SENSOR LETTERS | 2007年 / 5卷 / 01期
关键词：
anodic oxidization; high aspect ratio; micro electro mechanical systems (MEMS); magnetic microactuators; high magnetic field;
D O I：
10.1166/sl.2007.006
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
An effect of an applied field on processing accuracy of microfabrication by using anodic oxidization of aluminum has been investigated. Aluminum sheets have been anodized in oxalic acid applying a dc magnetic field of 7.0 kOe. Applying field during the anodization process reduces the width of the anodization by 33% compared to that without the magnetic field. It was found that the applied field affects the growth direction of the anodic oxidization along the field direction due to Lorentz force. This indicates that the microfabrication technique by anodic oxidization of aluminum in an applied field is useful method for realizing micro electro mechanical systems (MEMS) devices, such as microactuators.
引用
收藏
页码：293 / 295
页数：3
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