Optical emission spectroscopy and Langmuir probe characterisation of the plasma during high-pressure sputter deposition of high-Tc superconducting YBa2Cu3O7-x thin films

Langmuir probe measurements and optical emission spectroscopy have been performed during high-pressure d.c. on axis sputter deposition of YBa2Cu3O7-x films. An advanced experimental method for probe data analysis has been used for three-dimensional mapping of the electron temperature. T-e, and density, n(e), of the plasma in the gap between the sputtering target and the heated substrate. Comparison of the ionic and atomic optical emission has illustrated the influence of small gas additions (H-2 and He) on plasma temperature. The results can be correlated with the properties of deposited YBa2Cu3O7-x films. (C) 2002 Elsevier Science Ltd. All rights reserved.