Analysis and metrology with a focused helium ion beam

被引：22

作者：

Sijbrandij, Sybren ^{[1
]}

Notte, John ^{[1
]}

Scipioni, Larry ^{[1
]}

Huynh, Chuong ^{[1
]}

Sanford, Colin ^{[1
]}

机构：

[1] Carl Zeiss SMT Inc, ALIS Business Unit, Peabody, MA 01960 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2010年 / 28卷 / 01期

关键词：

backscatter; focused ion beam technology; helium ions; ion beams; CONTRAST;

D O I：

10.1116/1.3271254

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The newly introduced ORION (TM) helium ion microscope has been used for high resolution imaging and nanofabrication. More recently, an energy sensitive detector has been developed that permits the measurement of the energy spectrum of the backscattered helium ions. The spectra can be analyzed directly or compared with the simulated spectra from hypothetical models of the specimen. The technique can provide information about the elemental composition of the specimen or structural information (for example, layer thickness) of the specimen.

引用

页码：73 / 77

页数：5

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