RFID MEMS Sensor Concept Based on Intermodulation Distortion

被引:30
|
作者
Viikari, Ville [1 ]
Seppa, Heikki [1 ]
机构
[1] Tech Res Ctr Finland, VTT, FIN-02150 Espoo, Finland
关键词
Mixers; radio frequency (RF) microelectromechanical systems (MEMS); radio frequency identification (RFID); wireless sensors; HARMONIC RADAR; DESIGN; FLIGHT;
D O I
10.1109/JSEN.2009.2031809
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.
引用
收藏
页码:1918 / 1923
页数:6
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