Optical and structural properties of SnO2-based sol-gel thin films

被引：0
|
作者：
Anastasescu, M. [1 ]
Gartner, M. [1 ]
Mihaiu, S. [1 ]
Anastasescu, C. [1 ]
Purica, M. [2 ]
Manea, E. [2 ]
Zaharescu, M. [1 ]
机构：
[1] Acad Romana, Inst Phys Chem Illie Murgulescu, Splaiul Independentei 202, Bucharest 060021, Romania
[2] R&D Microtechnol, Bucharest 023573, Romania
来源：
2006 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2 | 2007年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
SnO2 thin films have been deposited an glass from Sn (II)-2-ethythexanoate precursor using the dip-coating sol-gel method. Based on spectroscopic ellipsometry (SE) measurements optical and strucutural properties of the SnO2, films have been obtained It was found that the concentration of tin oxide sols used,for deposition strongly influences the thickness and the optical properties of the film, such as optical constants (n and k-) or optical conductivity (sigma).
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页码：163 / +
页数：2
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