A novel phase measuring deflectometry for aspheric mirror test

被引:58
|
作者
Tang, Yan [1 ]
Su, Xianyu [1 ]
Wu, Fan [2 ]
Liu, Yuankun [1 ]
机构
[1] Sichuan Univ, Dept Optoelect, Chengdu 610064, Peoples R China
[2] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
来源
OPTICS EXPRESS | 2009年 / 17卷 / 22期
基金
中国国家自然科学基金;
关键词
3D SHAPE MEASUREMENT; SURFACES;
D O I
10.1364/OE.17.019778
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A method based on fringe reflection is presented to measure the aspheric mirror with higher precise. This method measures the absolute height of the aspheric mirror with dummy paraboloid, while the camera is located beside the optical axis of the test surface. It can be used to measure the aspheric mirror with high deviation. And for locating the camera beside the optical axis, this method doesn't have occlusion problem and can do the measurement more flexibility. Furthermore, compared with the traditional PMD, this method measures the tested surface with dummy paraboloid instead of the intersection of two straight lines, so it doesn't need to calibrate the image projection vectors. And the errors of the calibration influence this method less than the traditional method. Therefore, this method can measure the high deviation aspheric mirror with higher precise even if the calibration precise isn't very high. Computer simulations and preliminary experiment validate the feasibility of this method. (C) 2009 Optical Society of America
引用
收藏
页码:19778 / 19784
页数:7
相关论文
共 50 条
  • [1] Testing an aspheric mirror based on phase measuring deflectometry
    Zhao, Wenchuan
    Su, Xianyu
    Liu, Yuankun
    Zhang, Qican
    OPTICAL ENGINEERING, 2009, 48 (10)
  • [2] Testing an aspheric mirror based on phase measuring deflectometry
    Zhao W.
    Su X.
    Liu Y.
    Zhang Q.
    Zhongguo Jiguang/Chinese Journal of Lasers, 2010, 37 (05): : 1338 - 1341
  • [3] Improved phase-measuring deflectometry for aspheric surfaces test
    Guo, Chunfeng
    Lin, Xiaoyan
    Hu, Anduo
    Zou, Jun
    APPLIED OPTICS, 2016, 55 (08) : 2059 - 2064
  • [4] 3D shape measurement of the aspheric mirror by advanced phase measuring deflectometry
    Tang, Yan
    Su, Xianyu
    Liu, Yuankun
    Jing, Hailong
    OPTICS EXPRESS, 2008, 16 (19) : 15090 - 15096
  • [5] Phase measuring deflectometry for convex aspheric surface measurement
    Yan, Ziliang
    Li, Dahai
    Zhang, Xinwei
    Ge, Renhao
    APPLIED OPTICS, 2024, 63 (06) : 1583 - 1589
  • [6] Three-dimensional shape measurement of aspheric mirrors with null phase measuring deflectometry
    Guo, Chunfeng
    Hu, Anduo
    OPTICAL ENGINEERING, 2019, 58 (10)
  • [7] Aided Imaging Phase Measuring Deflectometry Based on Concave Focusing Mirror
    Li, Ziyu
    Gao, Nan
    Meng, Zhaozong
    Zhang, Zonghua
    Gao, Feng
    Jiang, Xiangqian
    PHOTONICS, 2023, 10 (05)
  • [8] Implementation of Hartmann test for measuring 0.9-m aspheric mirror
    Yang, HS
    Lee, YW
    Lee, JH
    Song, JB
    Lee, HY
    Lee, IW
    OPTICAL DESIGN AND TESTING II, PTS 1 AND 2, 2005, 5638 : 154 - 163
  • [9] A novel phase measuring deflectometry based on polar coordinate
    Fu, Yanjun
    Liao, Wentao
    Jiang, Guangyu
    Zhong, Kejun
    Ma, Fuqing
    OPTICS AND LASER TECHNOLOGY, 2025, 181
  • [10] A Novel Phase Measuring Deflectometry Based on Spiral Fringes
    Fu, Yanjun
    Liao, Wentao
    Jiang, Guangyu
    Li, Fangfang
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2024, 73