Phase Noise Modelling in Parallel-plate MEMS variable capacitors

被引：0
|
作者：
Lazaro, A. [1 ]
Girbau, D. [1 ]
机构：
[1] Univ Rovira & Virgili, Dep Elect Elect & Automat Engn, Tarragona 43007, Spain
来源：
PROCEEDINGS OF THE 2009 SPANISH CONFERENCE ON ELECTRON DEVICES | 2009年
关键词：
INTERMODULATION; DISTORTION; VARACTORS;
D O I：
10.1109/SCED.2009.4800482
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A CAD electromechanical model for phase noise simulation has been developed; it allows the simulation of the mechanical and RF behaviour for electrostatic MEMS devices taking Brownian noise into consideration. The model is implemented in commercial circuit software (ADS-based). The model is applied to study the effect of MEMS varactors in oscillator phase noise. The model describes the important nonlinear effects in the low frequency phase noise introduced by Brownian noise in the MEMS suspended membrane.
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页码：266 / 269
页数：4
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