Electrostatic Compensation of Structural Imperfections in Dynamically Amplified Dual-Mass Gyroscope

被引：0
|
作者：
Efimovskaya, Alexandra [1 ]
Lin, Yu-Wei [1 ]
Wang, Danmeng [1 ]
Shkel, Andrei M. [1 ]
机构：
[1] Univ Calif Irvine, MicroSyst Lab, Irvine, CA 92697 USA
来源：
2017 4TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL) | 2017年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a study on dynamics of a dual-mass MEMS vibratory gyroscope in presence of imperfections and reports a method for precision electrostatic frequency tuning of the operational modes. The presented tuning algorithm involves, first, assessing the modes mismatch using the experimental frequency responses of both proof-masses, followed by the identification of the stiffness mismatch along the two axes and anisoelasticity angles alpha and beta, then choosing the tuning voltages for modification of the diagonal, off-diagonal, and coupling terms in the stiffness matrix. Results of simulation are verified using experimental electrostatic frequency tuning of a dynamically amplified gyroscope. The frequency split between the operational modes was reduced from 26 Hz down to 50 mHz, resulting in 17x increase in the gyroscope scale factor.
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页码：27 / 30
页数：4
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