[1] Chinese Acad Sci, Key Lab Microelect & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China
[2] Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China
[3] Univ Chinese Acad Sci, Sch Phys Sci, Beijing 100049, Peoples R China
[4] Renmin Univ China, Beijing Key Lab Optoelect Funct Mat & Micronano D, Dept Phys, Beijing 100872, Peoples R China
[5] Univ Chinese Acad Sci, Coll Microelect, Beijing 100049, Peoples R China
[6] Songshan Lake Mat Lab, Dongguan 523808, Guangdong, Peoples R China