A batch-processed vacuum-sealed capacitive pressure sensor

被引：0
|
作者：
Chavan, AV
Wise, KD
机构：
来源：
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 1997年
关键词：
vacuum sealing; capacitive sensor; pressure;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports a multi-transducer vacuum-sealed capacitive barometric pressure sensor. The device operates with a resolution of 25mTorr over a pressure range from 600 to 800 Torr. The sensitivity is 27fF/Torr (3000ppm/Torr). The TCO at 750 Torr is 3969ppm/degrees C and the TCS is about 1000ppm/degrees C. The device uses a single layer of polysilicon both for sealing to the glass and for transfer of the glass electrode in the reference cavity to the outside world. The device is read out using a switched-capacitor charge integrator and an on-chip compensation capacitor.
引用
收藏
页码：1449 / 1452
页数：4
相关论文
共 50 条
  • [1] Batch-processed vacuum-sealed capacitive pressure sensors
    Chavan, AV
    Wise, KD
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2001, 10 (04) : 580 - 588
  • [2] An HDL model for a vacuum-sealed micromachined pressure sensor
    Guindi, RS
    SYSTEM-ON-CHIP FOR REAL-TIME APPLICATIONS, 2003, : 429 - 439
  • [3] Batch-processed carbon nanotube wall as pressure and flow sensor
    Choi, Jungwook
    Kim, Jongbaeg
    NANOTECHNOLOGY, 2010, 21 (10)
  • [4] A wireless batch sealed absolute capacitive pressure sensor
    Akar, O
    Akin, T
    Najafi, K
    SENSORS AND ACTUATORS A-PHYSICAL, 2001, 95 (01) : 29 - 38
  • [5] A monolithic fully-integrated vacuum-sealed CMOS pressure sensor
    Chavan, AV
    Wise, KD
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2002, 49 (01) : 164 - 169
  • [6] Vacuum-sealed silicon micromachined pressure sensors
    Tohoku Univ, Sendai, Japan
    Proc IEEE, 8 (1627-1639):
  • [7] Vacuum-sealed silicon micromachined pressure sensors
    Esashi, M
    Sugiyama, S
    Ikeda, K
    Wang, YL
    Miyashita, H
    PROCEEDINGS OF THE IEEE, 1998, 86 (08) : 1627 - 1639
  • [8] A low cost batch-sealed capacitive pressure sensor
    Park, JS
    Gianchandani, YB
    MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, : 82 - 87
  • [9] Vacuum-sealed casting process under pressure
    *LI Chen-xi1
    2. Department of Mechanical Engineering
    3. School of Materials Science and Engineering
    4. School of Foreign Languages
    China Foundry, 2006, (03) : 190 - 194
  • [10] Fabrication of SiC MEMS Pressure Sensor Based on Novel Vacuum-Sealed Method
    Wang, Chao
    Geng, Xiaobao
    Zhang, Haixia
    MICRONANO2008-2ND INTERNATIONAL CONFERENCE ON INTEGRATION AND COMMERCIALIZATION OF MICRO AND NANOSYSTEMS, PROCEEDINGS, 2008, : 623 - 626
12345