Displacement measurement system for inverters using computer micro-vision

被引：25
|
作者：
Wu, Heng [1 ]
Zhang, Xianmin [1 ]
Gan, Jinqiang [1 ]
Li, Hai [1 ]
Ge, Peng [2 ,3 ]
机构：
[1] S China Univ Technol, Sch Mech & Automot Engn, Guangdong Prov Key Lab Precis Equipment & Mfg Tec, Guangzhou 510640, Guangdong, Peoples R China
[2] S China Univ Technol, Sch Phys & Optoelect, Engn Res Ctr Optoelect Guangdong Prov, Guangzhou 510640, Guangdong, Peoples R China
[3] China Jiliang Univ, Zhejiang Key Discipline Instrument Sci & Technol, Hangzhou 310018, Peoples R China
来源：
OPTICS AND LASERS IN ENGINEERING | 2016年 / 81卷
基金：
中国国家自然科学基金;
关键词：
Micro-vision; Image processing; Microscopy; Displacement measurement; DIGITAL IMAGE CORRELATION; COMPLIANT; DESIGN;
D O I：
10.1016/j.optlaseng.2015.12.018
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We propose a practical system for noncontact displacement measurement of inverters using computer micro-vision at the sub-micron scale. The measuring method of the proposed system is based on a fast template matching algorithm with an optical microscopy. A laser interferometer measurement (LIM) system is built up for comparison. Experimental results demonstrate that the proposed system can achieve the same performance as the LIM system but shows a higher operability and stability. The measuring accuracy is 0.283 mu m. (C) 2016 The Authors. Published by Elsevier Ltd.
引用
收藏
页码：113 / 118
页数：6
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