Self-assembled monolayers (SAM) for tunneling sensors

被引：0
|
作者：
Tay, FEH [1 ]
O'Shea, SJ [1 ]
Wee, ATS [1 ]
Lim, PC [1 ]
Ongkodjojo, A [1 ]
机构：
[1] Inst Mat Res & Engn, Micro & Nano Syst Lab, Singapore 117602, Singapore
来源：
MATERIALS & PROCESS INTEGRATION FOR MEMS | 2002年 / 9卷
关键词：
tunneling; self-assembled monolayers (SAM); microaccelerometer; barrier height; stability;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this research, we explore the use of SAM (Self-Assembled Monolayers) materials for improving the robustness of a tunneling accelerometer. For gold coated tip-gold sample, the results are comparable with expectations for tunneling between gold electrodes in air. Using SAM materials, the robustness of the tunnel tips in terms of reliability shows promise of improved characteristics.
引用
收藏
页码：115 / 132
页数：18
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