Femtosecond laser micromachining: Applications in photonic device fabrication and laser joining

被引:1
|
作者
Watanabe, Wataru [1 ]
Nishii, Junji [1 ]
Itoh, Kazuyoshi [2 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Photon Res Inst, 1-8-31 Midorigaoka, Ikeda, Osaka 5638577, Japan
[2] Osaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
关键词
femtosecond laser; glass; refractive index change; waveguide; micro-fluidics; joining; welding;
D O I
10.1117/12.689321
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
When femtosecond laser pulses are tightly focused into a transparent material, the intensity in the focal volume is high enough to induce permanent structural modifications. Using these permanent structural modifications, one can micromachine structures inside the bulk of a transparent material in three-dimensions. I present the fabrication of photonic devices in transparent materials, including waveguides, couplers, diffractive lenses, and microfluidic channels in silica glass and PMMA. Applications of femtosecond laser micromachining include the joining of glass substrates by localized melting and resolidification.
引用
收藏
页数:9
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