Polarization-independent grating with the zeroth order suppressed

被引:0
|
作者
Lin, Zefan [1 ]
Wang, Bo [1 ]
Gao, Chenhao [1 ]
Wen, Kunhua [1 ]
Meng, Ziming [1 ]
Nie, Zhaogang [1 ]
Zhang, Fangteng [1 ]
Xing, Xiangjun [1 ]
Chen, Li [1 ]
Lei, Liang [1 ]
Zhou, Jinyun [1 ]
机构
[1] Guangdong Univ Technol, Sch Phys & Optoelect Engn, Guangzhou 510006, Peoples R China
来源
关键词
Polarization-independent grating; Beam splitter; Suppression of the zeroth order; BEAM SPLITTER; DESIGN;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper, a polarization-independent grating with the suppression of the zeroth order under normal incidence is introduced. In order to suppress the zeroth order, the rigorous coupled-wave method is used to optimize height of the grating groove and the thickness of the connecting layer, where the total efficiency of the +1st order and the -1st order is greater than 90%. The modal method can explain the physical mechanism of the grating transmission and the 0th order suppression. Then the process tolerance of the grating is studied, which provides a basis for the design of the zeroth order suppressed.
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页码:1 / 5
页数:5
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