Controlled assembly of patterned gold thin films using photolithographed self-assembled monolayers as templates

被引:12
|
作者
Liu, JF [1 ]
Zhang, LG [1 ]
Mao, PS [1 ]
Chen, DY [1 ]
Gu, N [1 ]
Ren, JY [1 ]
Wu, YP [1 ]
Lu, ZH [1 ]
机构
[1] SOUTHEAST UNIV, CTR MICROELECT, NANJING 210096, PEOPLES R CHINA
关键词
D O I
10.1246/cl.1997.1147
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Patterned colloidal Au films were assembled from aqueous solution onto photolithographed self-assembled monolayers of (3-mercaptopropyl) trimethoxysilane films on silica. The colloidal Au closely replicated the mask patterns. The self-assembly were through Au-S covalent bounding. The present approach may be applicable to assembly of microelectronic circuits and microbiosensors.
引用
收藏
页码:1147 / 1148
页数:2
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