共 36 条
- [1] Large-area subwavelength aperture arrays fabricated using nanoimprint lithography IEEE Trans. Nanotechnol., 2008, 5 (527-531):
- [2] Fabrication of large area 100 nm pitch grating by spatial frequency doubling and nanoimprint lithography for subwavelength optical applications JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06): : 2816 - 2819
- [3] A new two-dimensional subwavelength resonant grating filter fabricated by Nanoimprint Lithography LEOS 2001: 14TH ANNUAL MEETING OF THE IEEE LASERS & ELECTRO-OPTICS SOCIETY, VOLS 1 AND 2, PROCEEDINGS, 2001, : 584 - 585
- [4] Large area high density quantized magnetic disks fabricated using nanoimprint lithography JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (06): : 3825 - 3829
- [5] Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (06): : 2874 - 2877
- [6] Large-area Metal Grid Ultraviolet Filter Fabricated by Nanoimprint Lithography 2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5, 2007, : 1219 - 1220
- [7] Tunable liquid crystal-resonant grating filters using superimposed grating structures fabricated by nanoimprint lithography 2004 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2, 2004, : 298 - 299
- [10] Soft UV-based Nanoimprint Lithography for large area imprinting applications EMERGING LITHOGRAPHIC TECHNOLOGIES XI, PTS 1 AND 2, 2007, 6517