FABRICATION, CHARACTERIZATION AND SIMULATION OF GRATING-BASED STRUCTURES FOR SURFACE-ENHANCED RAMAN SPECTROSCOPY (SERS) SUBSTRATES

Surface Plasmon Resonance (SPR) is a resonance phenomenon between electron on the metal surface and the incident light which generates quantized-plasmons oscillation. There are several approaches to excite SPR wave, i.e. by using a prism coupler, grating-based structure, waveguide coupling and nanoparticles. Among those methods, diffraction grating offers more simplicity in fabrication and cost-effective. This paper presents the experimental results on the fabrication of grating-based structure and characterization in those fabricated grating. The fabricated structure is also analyzed using Rigorous Coupled-Wave Analysis (RCWA) method to maximize the SERS electromagnetic field as SERS substrates. SERS substrates are a method to enhance Raman signal.