Precipitates originating from tungsten crucible parts in AlN bulk crystals grown by the PVT method

被引:8
|
作者
Langhans, Frank [1 ]
Kiefer, Stefan [2 ]
Hartmann, Carsten [1 ]
Markurt, Toni [1 ]
Schulz, Tobias [1 ]
Guguschev, Christo [1 ]
Naumann, Martin [1 ]
Kollowa, Sandro [1 ]
Dittmar, Andrea [1 ]
Wollweber, Juergen [1 ]
Bickermann, Matthias [1 ]
机构
[1] Leibniz Inst Crystal Growth Berlin, Max Born Str 2, D-12489 Berlin, Germany
[2] Univ Jena, Inst Geosci, Carl Zeiss Promenade 10, D-07745 Jena, Germany
关键词
aluminum nitride; precipitate; tungsten carbide; TEM; EPMA; LIGHT-EMITTING-DIODES; LOW-OXYGEN CONTENT; SINGLE-CRYSTALS; SCATTERING TOMOGRAPHY; WATER DISINFECTION; SUBSTRATE; DEFECTS;
D O I
10.1002/crat.201500201
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
In order to evaluate the possible involvement of crucible materials in the growth of AlN bulk crystals grown by physical vapor transport, we applied growth conditions with a high vertical thermal gradient and hence high supersaturation of aluminum vapor. Under these conditions, precipitates formed causing diffuse grayish substructures at the initial growth interface and in the crystal body, decorating dislocations. Electron microscopy studies revealed that the precipitates are elongated, single-phase particles with sizes of 50-500 nm of commensurate structure, oriented along the <11<(2)over bar>0> direction. Chemical analysis of the precipitates showed tungsten as well as carbon and oxygen. The lattice parameters of the precipitates are in close agreement to hexagonal tungsten hemicarbide (W2C). The possible transport from the tungsten parts and its conversion into tungsten hemicarbide precipitates is discussed. We thus conclude that the W2C precipitates may contribute to the decoration of dislocations, even in growth with moderate thermal gradients.
引用
收藏
页码:129 / 136
页数:8
相关论文
共 50 条
  • [1] Structural, optical, and electrical properties of bulk AlN crystals grown by PVT
    Bickermann, M
    Epelbaum, BM
    Winnacker, A
    SILICON CARBIDE AND RELATED MATERIALS 2003, PRTS 1 AND 2, 2004, 457-460 : 1541 - 1544
  • [2] A study on growing of bulk AlN single crystals grown having a (011) growth face of by PVT method
    Kang, Seung-Min
    JOURNAL OF THE KOREAN CRYSTAL GROWTH AND CRYSTAL TECHNOLOGY, 2015, 25 (01): : 32 - 34
  • [3] A study on the crystalline phases of AlN single crystals grown by PVT method
    Kang, Seung-Min
    JOURNAL OF THE KOREAN CRYSTAL GROWTH AND CRYSTAL TECHNOLOGY, 2014, 24 (02): : 54 - 58
  • [4] Defects induced broad spectral photoresponse of PVT-grown bulk AlN crystals
    Liu, Ge
    Yan, Chengyuan
    Zhou, Guigang
    Qin, Zuoyan
    Zhou, Qin
    Zheng, Ruisheng
    Wu, Honglei
    Sun, Zhenhua
    SCRIPTA MATERIALIA, 2018, 154 : 45 - 48
  • [5] Native seeding and silicon doping in bulk growth of AlN single crystals by PVT method
    Sumathi, R. Radhakrishnan
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 11, NO 3-4, 2014, 11 (3-4): : 545 - 548
  • [6] PVT growth of bulk AlN crystals with low oxygen contamination
    Bickermann, M
    Epelbamn, BM
    Winnacker, A
    5TH INTERNATIONAL CONFERENCE ON NITRIDE SEMICONDUCTORS (ICNS-5), PROCEEDINGS, 2003, 0 (07): : 1993 - 1996
  • [7] Characterization of dislocation arrays in AlN single crystals grown by PVT
    Dalmau, Rafael
    Moody, Baxter
    Xie, Jinqiao
    Collazo, Ramon
    Sitar, Zlatko
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2011, 208 (07): : 1545 - 1547
  • [8] Characterization of prismatic slip in PVT-grown AlN crystals
    Hu, Shanshan
    Fang, Haoyan
    Liu, Yafei
    Peng, Hongyu
    Cheng, Qianyu
    Chen, Zeyu
    Dalmau, Rafael
    Britt, Jeffrey
    Schlesser, Raoul
    Raghothamachar, Balaji
    Dudley, Michael
    JOURNAL OF CRYSTAL GROWTH, 2022, 584
  • [9] AlN bulk crystals grown on SiC seeds
    Dalmau, R
    Schlesser, R
    Rodriguez, BJ
    Nemanich, RJ
    Sitar, Z
    JOURNAL OF CRYSTAL GROWTH, 2005, 281 (01) : 68 - 74
  • [10] Growth and Stress Analysis of Spontaneous Nucleationc-Plane Bulk AlN Crystals by a PVT Method
    Wang, Guodong
    Zhang, Lei
    Wang, Yong
    Shao, Yongliang
    Chen, Chengmin
    Liu, Guangxia
    Yao, Xiaogang
    Wu, Yongzhong
    Hao, Xiaopeng
    CRYSTAL RESEARCH AND TECHNOLOGY, 2020, 55 (10)