Microstructure and mechanical properties of Cr-Si-N nanocomposite coatings deposited by combined cathodic arc middle frequency magnetron sputtering

被引：17

作者：

Zou, C. W.

Wang, H. J.

Li, M.

Yu, Y. F.

Liu, C. S.

Guo, L. P.

Fu, D. J. ^{[1
]}

机构：

[1] Wuhan Univ, Minist Educ, Accelerator Lab, Dept Phys, Wuhan 430072, Peoples R China

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2009年 / 485卷 / 1-2期

关键词：

Cr-Si-N coatings; Cathodic arc; Middle frequency magnetron sputtering; Hardness; Microstructure; THIN-FILMS; HYBRID SYSTEM;

D O I：

10.1016/j.jallcom.2009.06.055

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

An industrial scale cathodic arc assisted middle frequency magnetron sputtering system was introduced and Cr-Si-N nanocomposite coatings with various amounts of Si content have been synthesized. Energy dispersive spectroscope, X-ray diffraction, transmission electron microscopy, nanoindentation technique and friction measurement were employed to characterize the Microstructure and mechanical properties of the coatings. The microstructure and hardness of the coatings were greatly influenced by the Si content. The nc-CrN/a-Si3N4 structure was formed in the coatings and exhibited a maximum hardness of 39.8 GPa. The surfaces of the samples were smooth and the adhesion between the coating and substrate was higher than 50 N.These properties make it possible for industrial applications (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：236 / 240

页数：5

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