High-power excimer laser systems

被引:1
|
作者
Abdullin, E. N. [1 ]
Ivanov, N. G. [1 ]
Kovalchuk, B. M. [1 ]
Konovalov, I. N. [1 ]
Losev, V. F. [1 ]
Panchenko, A. N. [1 ]
Panchenko, Yu. N. [1 ]
Skakun, V. S. [1 ]
Tarasenko, V. F. [1 ]
Yastremsky, A. G. [1 ]
机构
[1] Russian Acad Sci, Inst High Current Elect, Siberian Div, Tomsk 643055, Russia
关键词
D O I
10.1134/S1054660X06010099
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Two-high power excimer laser systems with square (25 x 25 cm) and circular (with a diameter of 40 cm) cross sections of the output laser beam are described. The first (second) system consists of four (five) excimer lasers. The experimental results on the generation of the high-quality high-power laser pulses are presented. Laser beams with a pulse duration of 1-250 ns, a divergence of 0.01 mrad, a spectral line width of 0.01 cm(-1), and a pulse energy of up to 330 J are obtained.
引用
收藏
页码:104 / 115
页数:12
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