Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

被引：32
|
作者：
Toy, M. Fatih [1 ]
Ferhanoglu, Onur [1 ]
Torun, Hamdi [2 ]
Urey, Hakan [1 ]
机构：
[1] Koc Univ, Elect & Elect Eng Dept, Istanbul, Turkey
[2] Georgia Inst Technol, George W Woodruff Sch Mech Engn, Atlanta, GA 30332 USA
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2009年 / 156卷 / 01期
关键词：
Thermal detector; NETD; Optical readout; Diffraction grating; CCD camera;
D O I：
10.1016/j.sna.2009.02.010
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Thermo-mechanical detector arrays in the 160 x 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30mK NETD is achievable using >12-bit CCD camera for the readout. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：88 / 94
页数：7
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