Improved conformal coatings by oblique-angle deposition for bioreplication

被引：15
|
作者：
Pulsifer, Drew P. [1 ,2 ]
Lakhtakia, Akhlesh [1 ,2 ]
Martin-Palma, Raul J. [2 ,3 ]
机构：
[1] Penn State Univ, Dept Engn Sci & Mech, University Pk, PA 16802 USA
[2] Penn State Univ, Mat Res Inst, University Pk, PA 16802 USA
[3] Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USA
来源：
APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 19期
关键词：
THIN-FILMS; LITHOGRAPHY;
D O I：
10.1063/1.3259648
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The conformal-evaporated-film-by-rotation (CEFR) technique, a bioreplication method to produce high-fidelity conformal coatings on biotemplates by oblique-angle deposition, was modified to improve the uniformity of coating thickness. The substrate holding the biotemplate was rocked, in addition to rotating it about an axis passing normally through it With the compound eyes of the common blow fly as the biotemplate, quantitative comparison of coating thickness obtained by the original CEFR and the modified CEFR techniques showed the superiority of the latter. (C) 2009 American Institute of Physics. [doi: 10.1063/1.3259648]
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页数：3
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