State-of-the-art RF/analog foundry technology

被引：12

作者：

Lin, JCH ^{[1
]}

Yeh, TH ^{[1
]}

Lee, CY ^{[1
]}

Chen, CH ^{[1
]}

Tsay, JL ^{[1
]}

Chen, SH ^{[1
]}

Hsu, HM ^{[1
]}

Chen, CW ^{[1
]}

Huang, CF ^{[1
]}

Chiang, JM ^{[1
]}

Chang, A ^{[1
]}

Chang, RY ^{[1
]}

Chang, CL ^{[1
]}

Wang, SH ^{[1
]}

Wu, CC ^{[1
]}

Lin, CY ^{[1
]}

Chu, YL ^{[1
]}

Chen, SM ^{[1
]}

Hsu, CK ^{[1
]}

Liou, RS ^{[1
]}

Wong, SC ^{[1
]}

Tang, D ^{[1
]}

Sun, JY ^{[1
]}

机构：

[1] Taiwan Semicond Mfg Corp 9, Log Technol Div, Fab 2, Hsinchu 300, Taiwan

来源：

PROCEEDINGS OF THE 2002 BIPOLAR/BICMOS CIRCUITS AND TECHNOLOGY MEETING | 2002年

关键词：

D O I：

10.1109/BIPOL.2002.1042890

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present an overview of the state-of-the-art RF/Analog foundry technology as well as future trend and roadmap. This set of RF/analog technology is built on top of cutting-edge logic technology platforms and it enables cost-effective and fast-time-to-market/volume system-on-chip (SoC) applications, including the rapidly growing wireless-LAN (WLAN) and Blue tooth products in addition to traditional consumer and communication products. Results from 0.18um- to 0.13um-generation mixed-signal and RF CMOS technology, and SiGe BiCMOS technology are highlighted. Special optimization of active devices and precision high-Q components is also, illustrated.

引用

页码：73 / 79

页数：7

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