Laser ablation of a thin carbon layer deposited on a polymer substrate by Nd:YAG laser

被引:4
|
作者
Noguchi, T [1 ]
Suizu, K [1 ]
Nagayama, K [1 ]
机构
[1] Kyushu Univ, Fac Engn, Dept Aeronaut & Astronaut, Fukuoka 8128581, Japan
关键词
PLD; carbon thin film; Nd : YAG laser; polymer substrate;
D O I
10.1016/S0169-4332(02)00424-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A thin carbon film of 200 nm thickness was deposited on a polymethyl methacrylate (PMMA) substrate. It was then used as a target for laser ablation. The laser beam was focused from the rear through a PMMA. We call this special target "thin film target", which is found to enhance the laser energy density absorbed by the target. Infrared wavelength of Nd:YAG laser is used in this study due to the efficient absorption of energy by the ablated plasma plume. Ablation emission was observed by the highspeed streak camera, and it was shown to emanate from both sides of the target. The plume is seen to be composed of several groups moving with different velocities. The high velocity component in the rear side disappears with decreasing fluence intensity, i.e., the plume density increases with laser fluence, whose value is above the ablation threshold of PMMA. (C) 2002 Published by Elsevier Science B.V.
引用
收藏
页码:357 / 361
页数:5
相关论文
共 50 条
  • [1] Laser ablation of thin tungsten layers deposited on carbon substrate
    Paris, P.
    Aints, M.
    Laan, M.
    Kiisk, M.
    Likonen, J.
    Kolehmainen, J.
    Tervakangas, S.
    [J]. FUSION ENGINEERING AND DESIGN, 2009, 84 (7-11) : 1465 - 1467
  • [2] Thin films of silver nanoparticles deposited in vacuum by pulsed laser ablation using a YAG:Nd laser
    Alonso, J. C.
    Diamant, R.
    Castillo, P.
    Acosta-Garcia, M. C.
    Batina, N.
    Haro-Poniatowski, E.
    [J]. APPLIED SURFACE SCIENCE, 2009, 255 (09) : 4933 - 4937
  • [3] Thin carbon nitride films deposited by laser ablation with an XeCl excimer laser
    Luches, A
    D'Anna, E
    Leggieri, G
    Martino, M
    Perrone, A
    Majni, G
    Mengucci, P
    Gyorgy, E
    Mihailescu, IN
    Popescu, M
    [J]. ALT '97 INTERNATIONAL CONFERENCE ON LASER SURFACE PROCESSING, 1998, 3404 : 91 - 98
  • [4] Deposition of multilayered titanium thin film by Nd:YAG laser ablation
    Nakamura, T
    Takahashi, H
    Yamamoto, K
    Sato, N
    Muramatsu, A
    Matsubara, E
    [J]. METALLURGICAL AND MATERIALS PROCESSING: PRINCIPLES AND TECHNOLOGIES, VOL 1: MATERIALS PROCESSING FUNDAMENTALS AND NEW TECHNOLOGIES, 2003, : 1241 - 1246
  • [5] Fabrication of Polymer Waveguides by Laser Ablation Using a 355 nm Wavelength Nd:YAG Laser
    Zakariyah, Shefiu S.
    Conway, Paul P.
    Hutt, David A.
    Selviah, David R.
    Wang, Kai
    Rygate, Jeremy
    Calver, Jonathan
    Kandulski, Witold
    [J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 2011, 29 (23) : 3566 - 3576
  • [6] An investigation into laser ablation of copper films with a Nd:YAG laser
    Shamsaei, S.
    Ghoreishi, M.
    Javid, Y.
    [J]. LASERS IN ENGINEERING, 2012, 23 (3-4) : 151 - 162
  • [7] Carbon Nitride Thin Films Deposited by Plasma Assisted Nd∶YAG Laser Ablation of Graphite in N2+H2 Atmosphere
    YU Wei WANG Shufang ZHANG Lianshui LI Xiaowei FU Guangsheng (College of Physics Science and Technology
    [J]. Chinese Journal of Lasers, 2001, (06) : 56 - 60
  • [8] Nd:: YAG thin disk laser
    Johannsen, I
    Erhard, S
    Müller, D
    Stewen, C
    Giesen, A
    Contag, K
    [J]. ADVANCED SOLID STATE LASERS, PROCEEDINGS, 2000, 34 : 137 - 143
  • [9] Ablation of graphite in water by Nd:YAG laser
    Balchev, I.
    Nikolov, A.
    Stankova, N.
    Avramova, I.
    Valcheva, E.
    Russev, S.
    Karashanova, D.
    Kostadinov, I.
    Mladenoff, J.
    Kolev, S.
    Milenov, T.
    [J]. 20TH INTERNATIONAL CONFERENCE AND SCHOOL ON QUANTUM ELECTRONICS: LASER PHYSICS AND APPLICATIONS, 2019, 11047
  • [10] Nd:YAG laser ablation characteristics of thin CIGS solar cell films
    S. H. Lee
    C. K. Kim
    J. H. In
    D. S. Kim
    H. J. Ham
    S. H. Jeong
    [J]. Applied Physics B, 2013, 113 : 403 - 409