Spin-Coated In-Doped ZnO Nanorods for Transparent Conducting Oxide Applications

被引:9
|
作者
Kim, Jinhwan [1 ]
Lee, Gun-Hyun [1 ]
Yun, Gun-Ho [1 ]
Park, Bae-Won [1 ]
Jeong, Ji-Yun [1 ]
Sang-Choi [1 ]
Kim, Sung-Jin [2 ]
Chang, Seung Wook [3 ]
Koh, Jung-Hyuk [1 ]
机构
[1] Chung Ang Univ, Sch Elect & Elect Engn, Seoul 156756, South Korea
[2] Chungbuk Natl Univ, Coll Elect & Comp Engn, Cheongju 362763, South Korea
[3] Samsung Display Co Ltd, R&D Ctr, Gyeonggi Do 449902, South Korea
关键词
In-Doped ZnO; Transparent Conducting Oxide; THIN-FILMS;
D O I
10.1166/sam.2017.2974
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this paper, we have prepared different compositions and thicknesses of In-doped ZnO thin films using the spin-coating process. To determine the optimum electrical conductance and transmittance, 0-2.5 mol% In contents were doped onto ZnO thin films to realize transparent conducting-oxide applications. 1.5 mol% In-doped ZnO thin films showed the highest electrical conductance from among the other specimens considered, and displayed good optical transmittance properties. From these results, different thicknesses of 1.5 mol% In-doped ZnO thin films were analyzed for application to transparent conducting oxides. As the thickness of 1.5 mol% In-doped ZnO thin films increased, the optical transmittance was degraded, while the sheet resistance improved, and vice versa. In addition, as increasing the thickness of In-doped ZnO thin films, nanorods were developed. By developing these nanorods, the electrical conductivities improved significantly.
引用
收藏
页码:1193 / 1196
页数:4
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