Quantization of acoustic-phonon shear modes in a nanowaveguide

被引:1
|
作者
Mazouchi, M. [1 ]
Dutta, M. [1 ,2 ]
Stroscio, M. A. [1 ,2 ,3 ]
机构
[1] Univ Illinois, Dept Elect & Comp Engn, Chicago, IL 60607 USA
[2] Univ Illinois, Dept Phys, Chicago, IL 60607 USA
[3] Univ Illinois, Dept Bioengn, Chicago, IL 60607 USA
关键词
QUARTZ-CRYSTAL RESONATORS; THICKNESS-SHEAR; QUALITY FACTOR; SILICON; SCATTERING;
D O I
10.1063/1.4982905
中图分类号
O59 [应用物理学];
学科分类号
摘要
Acoustic energy trapping in a thin non-piezoelectric plate is studied. The confinement of resonant acoustic fields is described for the case where energy trapping is caused by thickening the center region of the plate. The elastic continuum mechanics model is used to determine the quantized acoustic-phonon modes in an isotropic nanowaveguide. The acoustic-phonon amplitudes and relative frequency dispersion relations are obtained analytically and presented for both the odd symmetry shear modes and even symmetry shear modes. The acoustic-phonon modes in the non-piezoelectric nanowaveguide are quantized. Furthermore, the limit of the quality factor and frequency (fQ) product achievable by a resonator is theoretically discussed and calculated in silicon resonators for three different orientations. Published by AIP Publishing.
引用
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页数:7
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