Surface and volume decay times of photoconductivity in n-type silicon wafers

被引:1
|
作者
Munakata, Chusuke [1 ]
Suzuki, Takumi [1 ]
机构
[1] Tohoku Inst Technol, Dept Elect, Taihaku Ku, Sendai, Miyagi 9828588, Japan
关键词
n-type silicon wafer; hydrofluoric acid; surface potential; microwave-detected photoconductive decay method; surface decay time; volume decay time; PHOTOVOLTAGES; GENERATION;
D O I
10.1143/JJAP.46.243
中图分类号
O59 [应用物理学];
学科分类号
摘要
Two photoconductive decay times in the surface and volume regions of silicon wafers can be separately derived from the microwave-detected photoconductive decay signals assuming two independent exponential functions for the annihilation of excess carriers. The surface decay times vary from 60 to 30 mu s when an n-type silicon wafer rinsed with a hydrofluoric acid solution is kept exposed to the air, while the volume decay times of around 2.5 mu s thus obtained are constant, as theoretically expected.
引用
收藏
页码:243 / 244
页数:2
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