Radial superresolution of the two-photon microfabrication method

被引：1
|
作者：
Wei, Peng [1 ]
Tan, Qiaofeng [2 ]
Zhu, Yu [3 ]
Duan, Guanghong [3 ]
机构：
[1] Beijing Univ Aeronaut & Astronaut, Dept Optoeletron, Sch Instrument Sci & Optoelect, Beijing 100083, Peoples R China
[2] Tsinghua Univ, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
[3] Tsinghua Univ, Dept Precis Instruments & Mechanol, Inst Mfg Engn, Beijing 100084, Peoples R China
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2009年 / 15卷 / 09期
关键词：
DIFFRACTIVE SUPERRESOLUTION; DESIGN;
D O I：
10.1007/s00542-009-0898-y
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The two-photon microfabrication method, which has been developed over several years, is a new way to produce the real three-dimension microstructure. And now, this technology is recognized as a promising process for the creation of nano- and microscale devices. However, there are still important issues to be settled, one of them is the radial superresolution. The radial superresolution diffraction theory is introduced in the two-photon microfabrication system. This method can improve the radial superresolution of the two-photon microfabrication system. The theoretical analysis of the photosensitive resin is discussed based oil the exciting power and concentration of free-radical theory. Experiment results of the two-photon microfabrication method verify the method and show that it can provide weight into the microfabrication system.
引用
收藏
页码：1349 / 1353
页数：5
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