Robot for use in ultrahigh vacuum

被引：0

作者：

Kanetomo, M ^{[1
]}

Kashima, H ^{[1
]}

Suzuki, T ^{[1
]}

机构：

[1] HITACHI LTD, PROD ENGN RES LAB, KANAGAWA, JAPAN

来源：

SOLID STATE TECHNOLOGY | 1997年 / 40卷 / 08期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：63 / +

页数：1

共 50 条

[1] Wafer-transfer robot for use in ultrahigh vacuum
Kanetomo, M
Kashima, H
Suzuki, T
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03): : 1385 - 1388
[2] INFRARED WINDOWS FOR ULTRAHIGH VACUUM USE
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[3] WINDOW SEALS FOR ULTRAHIGH VACUUM USE
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[4] A COMPACT MICROPOSITIONER FOR USE IN ULTRAHIGH-VACUUM
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[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (09): : 2687 - 2690
[5] USE OF GRAPHITE IN HIGH AND ULTRAHIGH VACUUM - REVIEW
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (05): : 647 - +
[6] THE USE OF POLYTETRAFLUOROETHYLENE BEARINGS IN ULTRAHIGH-VACUUM
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[7] USE OF ULTRAHIGH VACUUM VALVES FOR GAS HANDLING
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[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1959, 30 (06): : 494 - 494
[8] UNIVERSAL MOTION DEVICE FOR USE IN ULTRAHIGH VACUUM
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1968, 5 (03): : 90 - &
[9] ULTRAHIGH VACUUM SYSTEM FOR USE WITH POLARIZING SPECTROMETER
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[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1964, 35 (04): : 503 - &
[10] COMPACT GATE VALVE FOR ULTRAHIGH-VACUUM USE
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[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1972, 5 (07): : 626 - &

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