Encapsulated MEMS Resonators - A technology path for MEMS into Frequency Control Applications

被引：0
|
作者：
Kim, B. [1 ]
Melamud, R. [1 ]
Candler, R. A. [1 ]
Hopcroft, M. A. [1 ]
Jha, C. M. [1 ]
Chandorkar, S. [1 ]
Kenny, T. W. [1 ]
机构：
[1] Stanford Univ, Dept Mech & Elect Engn, Stanford, CA 94305 USA
来源：
2010 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS) | 2010年
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
MEMS resonators have been discussed as replacements for quartz crystals in electronics timing applications for more than 40 years. The emergence of high-quality, low-cost packaging for MEMS resonators has enabled the first demonstrations of long-term stability and opened the door for commercial applications.
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页码：1 / 4
页数：4
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