The layer-built sensor/actuator integrated array for the 2D feedback conveyance

被引：0

作者：

Ataka, Manabu ^{[1
]}

Mita, Makoto ^{[2
]}

Fujita, Hiroyuki ^{[1
]}

机构：

[1] Univ Tokyo, Ctr Int Res MicroMechatron, Inst Ind Sci, Meguro Ku, 4-6-1 Komaba, Tokyo 1538505, Japan

[2] Japan Aerospace Explorat Agcy, Inst Space & Astron Sci, Kanagawa, Japan

来源：

PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2 | 2007年

关键词：

micro conveyance system; arrayed micro actuators; feedback control;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We stack-integrated a transparent actuator array chip on a photo sensor array chip and demonstrated 2-D conveyance of an object on the array with closed loop feedback. The actuator array has 16 x 16 cells; each cell has four thermo-bimorph actuators. Matched array of photo-diodes detected the shadow of the object; this information is processed by FPGA that controls the actuator array to energize. We have demonstrated an automatic feedback conveyance to the target point by energizing the actuators just under the object.

引用

页码：226 / +

页数：2

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