Silicon nitride-based Kerr frequency combs and applications in metrology

被引:9
|
作者
Sun, Zhaoyang [1 ]
Li, Yang [1 ]
Bai, Benfeng [1 ]
Zhu, Zhendong [2 ]
Sun, Hongbo [1 ]
机构
[1] Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement & Instruments, Beijing, Peoples R China
[2] Natl Inst Metrol, Beijing, Peoples R China
来源
ADVANCED PHOTONICS | 2022年 / 4卷 / 06期
基金
中国国家自然科学基金; 北京市自然科学基金;
关键词
Kerr frequency comb; silicon nitride; Lgiato-Lefever equation; damascene process; precision measurements; ENTANGLED QUANTUM STATES; MICRORESONATOR SOLITONS; WAVE-GUIDES; GENERATION; MICROWAVE; RESONATORS; INTEGRATION; MODULATION; MICROCOMBS; STABILITY;
D O I
10.1117/1.AP.4.6.064001
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Kerr frequency combs have been attracting significant interest due to their rich physics and broad applications in metrology, microwave photonics, and telecommunications. In this review, we first introduce the fundamental physics, master equations, simulation methods, and dynamic process of Kerr frequency combs. We then analyze the most promising material platform for realizing Kerr frequency combs-silicon nitride on insulator (SNOI) in comparison with other material platforms. Moreover, we discuss the fabrication methods, process optimization as well as tuning and measurement schemes of SNOI-based Kerr frequency combs. Furthermore, we highlight several emerging applications of Kerr frequency combs in metrology, including spectroscopy, ranging, and timing. Finally, we summarize this review and envision the future development of chip-scale Kerr frequency combs from the viewpoint of theory, material platforms, and tuning methods.
引用
收藏
页数:17
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