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- [1] Investigation of Thermal Stability of TiN Film Formed by Atomic Layer Deposition Using Tetrakis(dimethylamino)titanium Precursor for Metal-Gate Metal-Oxide-Semiconductor Field-Effect Transistor[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (04)Hayashida, Tetsuro论文数: 0 引用数: 0 h-index: 0机构: Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, Japan Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, JapanEndo, Kazuhiko论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, JapanLiu, Yongxun论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, JapanKamei, Takahiro论文数: 0 引用数: 0 h-index: 0机构: Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, Japan Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, JapanMatsukawa, Takashi论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, JapanO'uchi, Shin-ichi论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, JapanSakamoto, Kunihiro论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, JapanTsukada, Junichi论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, JapanIshikawa, Yuki论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, JapanYamauchi, Hiromi论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, JapanOgura, Atsushi论文数: 0 引用数: 0 h-index: 0机构: Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, Japan Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, JapanMasahara, Meishoku论文数: 0 引用数: 0 h-index: 0机构: Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Meiji Univ, Sch Sci & Technol, Tama Ku, Kawasaki, Kanagawa 2148571, Japan