Optimization of anti-reflective coatings using a graded index based on silicon oxynitride

被引：4

作者：

Kaddouri, A. M. ^{[1
]}

Kouzou, A. ^{[1
]}

Hafaifa, A. ^{[1
]}

Khadir, A. ^{[2
]}

机构：

[1] Djelfa Univ, Fac Sci & Technol, Appl Automat & Ind Diagnost Lab LAADI, Djelfa, Algeria

[2] Univ Djelfa, Mat Sci & Informat Lab, Djelfa, Algeria

来源：

JOURNAL OF COMPUTATIONAL ELECTRONICS | 2019年 / 18卷 / 03期

关键词：

Anti-reflective coatings; Silicon oxynitride; Graded index; Linear profile; Sub-linear; Super-linear; Oblique incidence; MULTILAYER SYSTEMS; COHERENT; LAYER;

D O I：

10.1007/s10825-019-01334-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The present work deals with a comparative study of three anti-reflective coatings (ARCs) based on oxynitride using a gradient refractive index (graded index) following three proposed profiles such as the linear, sub-linear and super-linear profiles. This comparison is based on the quality of the obtained photocurrent density improvement and the normalized photocurrent. At the same time, the conventional single-layer ARC SiO3 and Si3O4 are presented as reference in this comparison. Two parameters are taken into account as the main variables which have the main impact and a degree of sensitivity to the quality of the ARC, the thickness of the layer and the irradiation incidence angle. This study has led to the determination that the super-linear profile is the optimal profile, and that it can be used in multilayer ARCs to ensure optimal energy conversion versus the layers' thickness and reduced light loss under oblique incidence with improved efficiency.

引用

页码：971 / 981

页数：11

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