Evaluation of 600V/100A NPT-IGBT with a non-self-align shallow p-well formation techniques

被引:0
|
作者
Otsuki, M [1 ]
Momota, S [1 ]
Kirisawa, M [1 ]
Wakimoto, H [1 ]
Seki, Y [1 ]
机构
[1] Fuji Elect Co LTd, Matsumoto Factory, Semicond Device R&D Ctr, Matsumoto, Nagano 3900821, Japan
关键词
D O I
10.1109/ISPSD.2000.856812
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Experimental results of planer gate IGBTs fabricated with newly developed a non-self-align shallow p-well formation technique are presented The 600V/100A NPT-IGBT shows the on-state voltage drop of about 1.7V, which is more than 0.4V reduction compared to the conventional devices. The average short circuit withstand capability of about 30 mu sec was obtained without external current limiting functions.
引用
收藏
页码:225 / 228
页数:4
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