A NOVEL SI-BASED ANTENNA WITH SUSPENDING AND ELECTROMAGNETIC BAND-GAP STRUCTURES

被引：0

作者：

Huang, I. Y. ^{[1
]}

Lin, K. H. ^{[1
]}

Sun, C. H. ^{[1
]}

Hsu, K. Y. ^{[1
]}

机构：

[1] Natl Sun Yat Sen Univ, Dept Elect Engn, Kaohsiung, Taiwan

来源：

2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2011年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This study designs and fabricates a suspending antenna on silicon substrate with backside electromagnetic band-gap (EBG) structures using surface and bulk micromachining techniques. The proposed Si-based antenna with dimension 7 mm x 18 mm x 0.5 mm only and is constructed of a ground copper plane, supporting copper vias, a suspending F-shape copper conducting layer and backside silicon cavities (to form the EBG structure). The implemented Si-based antenna demonstrates very low return loss (-35.5 dB, at 4.85 GHz) and very wide bandwidth (43%, 3.75 similar to 5.8 GHz).

引用

页码：756 / 759

页数：4

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