Research on Electrolyte Jet Assisted Laser Micromachining Technology

被引:1
|
作者
Hu, Yulan [1 ]
Hao, Weiguang [1 ]
Liu, Guoqiang [2 ]
Liu, Yajie [2 ]
Liu, Zilin [1 ]
机构
[1] Shenyang Ligong Univ, Sch Informat Sci & Engn, Shenyang, Liaoning, Peoples R China
[2] Shenyang Ligong Univ, Sch Mech Engn, Shenyang, Liaoning, Peoples R China
基金
中国国家自然科学基金;
关键词
D O I
10.1088/1742-6596/1187/3/032044
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
For the traditional laser processing method, processing defects such as recasting layer, microcrack and high concentration of heat affected zone are inevitably generated, which reduces the surface quality and service life of the microstructure. In this paper, the electrolyte jet assisted laser micromachining technology is proposed. This technology applies the laser beam and the corrosive electrolyte jet beam coaxially to the workpiece. At the same time as the laser acts, the corrosive electrolyte jet continuously scour, cool and slightly corrode the processing area. The effect can reduce the thickness of the recast layer, reduce the number of microcracks, and eliminate the high concentration of the heat affected zone. In this paper, the causes of recasting layer in laser processing are analyzed firstly. The material removal mechanism involved in the laser jet assisted laser micromachining and the mechanism of laser coupled electrolyte jet beam are studied. The flow field in the laser jet assisted laser drilling process is established. And the mathematical model of the temperature field; the effects of laser pulse energy, laser repetition frequency, electrolyte concentration and electrolyte jet velocity on the thickness of material recast layer were studied, and the basic processing technology of electrolyte jet assisted laser micromachining was preliminarily mastered, laying the foundation for further research on electrolyte jet assisted laser micromachining technology.
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页数:8
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