Femtosecond laser-assisted etching of three dimensional woodpile micro-channel arrays in fused silica

被引：0
|
作者：
Ho, Stephen [1 ,2 ]
Haque, Moez [1 ,2 ]
Herman, Peter Robert [1 ,2 ]
Aitchison, James Stewart [1 ,2 ]
机构：
[1] Univ Toronto, Edward S Rogers Sr Dept Elect & Comp Engn, 10 Kings Coll Rd, Toronto, ON M5S 3G4, Canada
[2] Univ Toronto, Inst Opt Sci, Toronto, ON M5S 3G4, Canada
来源：
2011 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2011年
关键词：
PHOTONIC CRYSTALS; FABRICATION; OPTICS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A three-dimensional inverted-woodpile micro-channel array was fabricated in bulk fused silica with femtosecond laser and HF etching. An exposure compensation algorithm provided uniform periodic woodpile structure defining a novel micro-channel.
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页数：2
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