High-electron-mobility AlGaN/GaN transistors (HEMTs) for fluid monitoring applications

被引:0
|
作者
Neuberger, R
Müller, G
Ambacher, O
Stutzmann, M
机构
[1] EADS Deutschland GmbH, Res & Technol FT2M, D-81663 Munich, Germany
[2] Tech Univ Munich, Walter Schottky Inst, D-85748 Garching, Germany
关键词
D O I
10.1002/1521-396X(200105)185:1<85::AID-PSSA85>3.0.CO;2-U
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
High-electron-mobility transistors (HEMTs) based on AlGaN/GaN heterostructures were success fully tested as chemically sensing devices. Exposing the unprotected polar GaN surface in the gate area of a HEMT to liquids of different polarity, milliampere changes in the source-drain current could be detected. These sensing effects are likely to arise from chemical interactions with a sheet of ionic charge on the free GaN surface which compensates the electronic charge of a two-dimensional electron gas at a subsurface AlGaN/GaN interface.
引用
收藏
页码:85 / 89
页数:5
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