Simulation and fabrication of an electromagnetic bistable MEMS microactuator

被引：0
|
作者：
Zhang, YH [1 ]
Fu, S [1 ]
Ding, GF [1 ]
Ma, J [1 ]
Cai, BC [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Film & Microfabricat Technol Key Lab Educ Minist, Res Inst Micro Nanometer Sci & Technol, Shanghai 200030, Peoples R China
来源：
Proceedings of the International Conference on Mechanical Engineering and Mechanics 2005, Vols 1 and 2 | 2005年
关键词：
MEMS; bistable electromagnetic microactuator; finite element method; simulation; UV-LIGA technology;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
An electromagnetic MEMS microactuator with two stable positions is simulated and fabricated. The proposed structure for the microactuator consists of a soft magnetic cantilever beam with two free ends, a soft magnetic torsional beam with two fixed ends, double-layer planar coils and permanent magnets. With the electromagnetic actuation arising from the planar coils, the cantilever beam will switch from one stable position to the other. The cantilever beam has two stable positions due to the use of the permanent magnets. The designed microactuator is simulated by the finite element method, using the ANSYS 7.0 software. The working mechanism for the bistability of the microactuator is analyzed. The device with the size of 2.2mm x 2.5mm is fabricated by UV-LIGA technology. The result of test shows that the switching between two stable states is successfully represented by a current pulse with about 50mA amplitude through the integrated coils in agreement with the result of simulation.
引用
收藏
页码：1418 / 1421
页数：4
相关论文
共 50 条
  • [1] Design and fabrication of a bistable electromagnetic microactuator
    张永华
    丁桂甫
    孙晓峰
    蔡炳初
    [J]. Advances in Manufacturing, 2006, (06) : 541 - 546
  • [2] Fast switching bistable electromagnetic microactuator
    Zhang, YH
    Ding, GF
    Dai, XH
    Cai, BC
    [J]. ELECTRONICS LETTERS, 2005, 41 (23) : 1276 - 1278
  • [3] Electromagnetic bistable microactuator fabricated on a single wafer
    Miao, Xiaodan
    Dai, Xuhan
    Wang, Peihong
    Huang, Yi
    Ding, Guifu
    Zhao, Xiaolin
    [J]. MICRO & NANO LETTERS, 2012, 7 (02): : 99 - 100
  • [4] Simulation and Fabrication of a Bistable Electromagnetic Micro-Actuator
    Miao, Xiaodan
    Dai, Xuhan
    Ding, Guifu
    Zhao, Xiaolin
    [J]. ELECTROMAGNETICS, 2012, 32 (05) : 274 - 286
  • [5] Bistable snapping microactuator
    Matoba, Hirotsugu
    Ishikawa, Toshio
    Kim, Chang-Jin
    Muller, Richard S.
    [J]. Proceedings of the IEEE Micro Electro Mechanical Systems, 1994, : 45 - 50
  • [6] Design and fabrication of a current-pulse-excited bistable magnetic microactuator
    Univ of Duisburg, Duisburg, Germany
    [J]. Sens Actuators A Phys, 3 ([d]259-264):
  • [7] Design and fabrication of a current-pulse-excited bistable magnetic microactuator
    Ren, H
    Gerhard, E
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1997, 58 (03) : 259 - 264
  • [8] Design, Fabrication, and Dynamics of an Electromagnetic Vertical Microactuator for Endomicroscopy
    Zhang, Jiawei
    Teeple, Clark B.
    Choi, Jongsoo
    Kang, Samantha
    Rivas, Joseph E.
    Oldham, Kenn R.
    [J]. 2017 IEEE INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM), 2017, : 1316 - 1321
  • [9] A fast switching bistable electromagnetic microactuator fabricated by UV-LIGA technology
    Zhang, Yong-hua
    Ding, Gui-fu
    Fu, Shi
    Cai, Bing-chu
    [J]. MECHATRONICS, 2007, 17 (2-3) : 165 - 171
  • [10] Design, fabrication, and evaluation of vacuum testing of a novel electromagnetic microactuator
    Lai, Tenghsien
    Tsou, Chingfu
    [J]. JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2011, 10 (04):
12345