Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon Photonics Wafers

被引：0
|
作者：
Jabon, Kenneth M. [1 ]
Poulton, Christopher, V [1 ]
Shiue, Ren-Jye [1 ]
Byrd, Matthew J. [1 ]
Su, Zhan [1 ]
Teimourpour, Mohammad H. [1 ]
Breitenstein, Scott [1 ]
Millman, Ronald P., Jr. [1 ]
Atlas, Dogan [1 ]
Watts, Michael R. [1 ]
Timurdogan, Erman [1 ]
机构：
[1] Analog Photon, 1 Marina Pk Dr,Suite 205, Boston, MA 02210 USA
来源：
2021 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXPOSITION (OFC) | 2021年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We perform wafer-scale measurements of silicon photonics components using broadband (100nm+) edge couplers and reflecting optical fiber probes for the first time. We demonstrate <1dB/cm waveguide loss and 25GHz+ micro-ring modulators on 300mm wafers.
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