Optical Coherence Microscopy for Integrated Photonics Devices Imaging

被引:0
|
作者
Sirotin, Maxim A. [1 ]
Romodina, Maria N. [1 ]
Lyubin, Evgeny, V [1 ]
Soboleva, Irina, V [1 ,2 ]
Vigdorchik, Vitalina V. [1 ]
Safronov, Kirill R. [1 ]
Akhremenkov, Daniil, V [1 ]
Bessonov, Vladimir O. [1 ,2 ]
Fedyanin, Andrey A. [1 ]
机构
[1] Lomonosov Moscow State Univ, Fac Phys, Moscow 119991, Russia
[2] Russian Acad Sci, Frumkin Inst Phys Chem & Electrochem, Moscow 119071, Russia
关键词
D O I
10.1109/CLEO/Europe-EQEC52157.2021.9541555
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
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页数:1
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