Study of particles separation in the ultrasonic microdevice

被引：0
|
作者：
Yang, Hui [1 ]
Guo, Hang [1 ]
机构：
[1] Xiamen Univ, Pen Tung Sah MEMS Res Ctr, Xiamen, Peoples R China
来源：
2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6 | 2007年
关键词：
particles separation; ultrasonic method; MEMS; bulk-mode excitationt;
D O I：
10.1109/ULTSYM.2007.401
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper, a new MEMS device that can separate microparticles on-chip by the use of bulk-mode excited membrane vibration is proposed, designed and microfabricated. By starting from the one-dimensional analytical mode of forces acting on particles,the force for ultrasonically separating particles is profoundly studied, and finite element method in ANSYS is used to analyze the vibration modes, the acoustic field and flow field in the microdevice due to the membrane vibration. With these analyses, we obtain the ultrasonic radiation force acting on different kinds of particles in the water, blood plasma and milk medium when the microdevice vibrates at different frequencies and then study their separation.
引用
收藏
页码：1594 / 1597
页数：4
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