Application of the S-transform to the phase-shift extraction in phase shifting interferometry

被引:1
|
作者
Zielinski, Bartosz [1 ]
Patorski, Krzysztof [1 ]
机构
[1] Warsaw Univ Technol, Inst Micromech & Photon, PL-02525 Warsaw, Poland
关键词
Phase-shifting interferometry; S-transform; Arbitrary phase shifts; ITERATIVE ALGORITHM;
D O I
10.1117/12.882568
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new method of determining arbitrary phase shifts in Phase Shifting Interferometry (PSI) is presented. The method uses a unique property of Localized Cross Spectral Analysis (LCSA) that constitutes a part of the S-transform to estimate the unknown parameter. The computed phase shifts are then used as an input to the generalized PSI algorithm to obtain accurate phase distribution information. The effectiveness of this method is then verified by means of computer simulations and experimentally acquired data.
引用
收藏
页数:11
相关论文
共 50 条
  • [1] Phase-shift extraction for generalized phase-shifting interferometry
    Gao, Peng
    Yao, Baoli
    Lindlein, Norbert
    Mantel, Klaus
    Harder, Irina
    Geist, Eduard
    OPTICS LETTERS, 2009, 34 (22) : 3553 - 3555
  • [2] Phase-shift extraction for phase-shifting interferometry by histogram of phase difference
    Xu, Jiancheng
    Li, Yong
    Wang, Hui
    Chai, Liqun
    Xu, Qiao
    OPTICS EXPRESS, 2010, 18 (23): : 24368 - 24378
  • [3] Phase-shift calibration algorithm for phase-shifting interferometry
    Chen, X
    Gramaglia, M
    Yeazell, JA
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2000, 17 (11): : 2061 - 2066
  • [4] REFERENCE PHASE-SHIFT DETERMINATION PHASE-SHIFTING INTERFEROMETRY
    PERRY, KE
    MCKELVIE, J
    OPTICS AND LASERS IN ENGINEERING, 1995, 22 (02) : 77 - 90
  • [5] Phase-Shift Extraction and Wavefront Reconstruction in Generalized Phase-Shifting Interferometry with a Standard Phase Object
    Li Jie
    Wang Yu-Rong
    Meng Xiang-Feng
    Yang Xiu-Lun
    Wang Qing-Pu
    CHINESE PHYSICS LETTERS, 2013, 30 (09)
  • [6] Phase-Shift Extraction and Wavefront Reconstruction in Generalized Phase-Shifting Interferometry with a Standard Phase Object
    李杰
    王玉荣
    孟祥锋
    杨修伦
    王青圃
    Chinese Physics Letters, 2013, 30 (09) : 76 - 79
  • [7] S-transform application in phase extraction of spectrally resolved interferometry measuring step height
    Luo, Wentao
    He, Yu
    Tang, Yan
    Cheng, Xiaolong
    APPLIED OPTICS, 2022, 61 (03) : 737 - 743
  • [8] Phase-shift extraction and wave-front reconstruction in phase-shifting interferometry with arbitrary phase steps
    Cai, LZ
    Liu, Q
    Yang, XL
    OPTICS LETTERS, 2003, 28 (19) : 1808 - 1810
  • [9] A NEW ALGORITHM FOR ELIMINATING PHASE-SHIFT ERROR IN PHASE SHIFTING INTERFEROMETRY
    Liu Chong Liang Xichang Peng Donglin State Key Laboratory of Mechanical Transmission
    Chinese Journal of Mechanical Engineering(English Edition), 1999, (02) : 51 - 55
  • [10] An accurate phase shift extraction algorithm for phase shifting interferometry
    Zhai, Zhongsheng
    Zhou, Li
    Zhang, Yanhong
    Dong, Zhengqiong
    Wang, Xuanze
    Lv, Qinghua
    OPTICS COMMUNICATIONS, 2018, 429 : 144 - 151