A capacitive humidity sensor based on ordered macroporous silicon with thin film surface coating

被引：103

作者：

Wang, Yun ^{[1
]}

Park, Seungwoo ^{[1
]}

Yeow, John T. W. ^{[1
]}

Langner, Andreas ^{[2
]}

Mueller, Frank ^{[2
]}

机构：

[1] Univ Waterloo, Waterloo, ON N2L 6P6, Canada

[2] Max Planck Inst Microstruct Phys, D-06120 Halle, Saale, Germany

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2010年 / 149卷 / 01期

基金：

加拿大自然科学与工程研究理事会;

关键词：

Humidity sensor; Ordered structure; Ordered macroporous silicon; Ta2O5; GAS-ADSORPTION; MEMBRANE; DRIFT;

D O I：

10.1016/j.snb.2010.06.010

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In this paper, we report a new approach for humidity sensing. The sensor is based on ordered macroporous silicon with a Ta2O5 thin film coating. The ordered macroporous silicon array has perfectly aligned pores and uniform pore size (4 mu m). The 95 nm Ta2O5 thin film is uniformly deposited on the pore surface by atomic layer deposition (ALD), which acts as an adsorption enhancement layer. The sensor's capacitance is measured to RH changes. The sensor shows very high sensitivity and small hysteresis, especially at high RH levels. It also shows very good repeatability and long term stability. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：136 / 142

页数：7

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