A Low-Cost Flexible Capacitive Pressure Sensor for Health Detection

被引:19
|
作者
Zeng, Yu [1 ]
Qin, Yafei [1 ]
Yang, Youpeng [1 ]
Lu, Xinyu [1 ]
机构
[1] Kunming Univ Sci & Technol, Fac Mech & Elect Engn, Kunming 650093, Yunnan, Peoples R China
基金
中国国家自然科学基金;
关键词
Sensors; Capacitance; Capacitive sensors; Electrodes; Dielectrics; Sensitivity; Pressure sensors; Flexible; low cost; sensors; pressure measurement; capacitance; HYDROGEL; SUPERCAPACITOR; SENSITIVITY;
D O I
10.1109/JSEN.2022.3158354
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, we develop a flexible capacitive pressure sensor with simple structure, low cost, wide operating range, excel repeatability and high sensitivity. The sensor greatly reduces cost while maintaining performance by using a simple method of preparing the dielectric layer and inexpensive chemical materials. The sensor has a excel dynamic response (80ms) and recovery (55ms) and combines high sensitivity (0.3199kPa(-1), < 10kPa) with a wide operating range (0.1-65 kPa). It is capable of stable operation for 1400 cycles. In addition, the capacitive pressure sensor has a large signal variation (4.1033nF/kPa), and the capacitance variation can be recognized and processed by a simple measurement circuit. Later experiments and the development of a wireless communication device have also demonstrated the great potential of this flexible capacitive pressure sensor for human detection and biomedical applications. Overall, this sensor is a promising low-cost wearable pressure sensor.
引用
收藏
页码:7665 / 7673
页数:9
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