Photoactivated In2O3 and SnO2 thin film gas sensors

被引：0
|
作者：
Comini, E [1 ]
Cristalli, A [1 ]
Faglia, G [1 ]
Sberveglieri, G [1 ]
机构：
[1] Univ Brescia, INFM, Gas Sensor Lab, Dept Chem & Phys Mat, I-25133 Brescia, Italy
来源：
TECHNICAL DIGEST OF THE SEVENTH INTERNATIONAL MEETING ON CHEMICAL SENSORS | 1998年
关键词：
D O I：
暂无
中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
摘要：
We report the effects of UV light illumination on the performance of In2O3 and SnO2 semiconductor gas sensors. The sample was prepared by Rf and DC sputtering in (Ar + O-2) and Ar atmospheres, respectively. We have tested the response of our gas sensor to Methane, Nitrogen Dioxide, Carbon Monoxide.
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收藏
页码：925 / 927
页数：3
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