Development of MEMS micro robot using piezoelectric actuator mechanism

This paper presents the MEMS (Micro Electro Mechanical Systems) micro robot using piezoelectric actuator mechanisms. The size of the fabricated micro robot was 3.8, 4.0, 3.5mm, width, length and height, respectively. The basic components of the MEMS micro robot were made from silicon wafer. The micro fabrication of the silicon wafer was done by the MEMS technology. The vibration of the piezoelectric elements was transduced to rotational movement by the piezoelectric actuator mechanisms. Link mechanisms generated the locomotion of the robot from rotational movement. In this paper, continuous movement was achieved by using the piezoelectric actuator mechanism without thermal activation.