Fabrication and property analysis of a MEMS micro-gripper for robotic micro-manipulation

被引：26
|
作者：
Kim, Bong-Seok [2 ]
Park, Joon-Shik [3 ]
Kang, Byoung Hun [4 ]
Moon, Chanwoo [1 ]
机构：
[1] Kookmin Univ, Coll Elect Engn & Comp Sci, Seoul 136702, South Korea
[2] Korea Elect Technol Inst, Intelligent Robot Res Ctr, Songnam, South Korea
[3] Korea Elect Technol Inst, Nano Mechatron Res Ctr, Songnam, South Korea
[4] Korea Polytech Univ, Dept Mech Design Engn, Shihung, South Korea
来源：
ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING | 2012年 / 28卷 / 01期
基金：
新加坡国家研究基金会;
关键词：
MEMS micro-gripper; Stiffness; Grip force; Micro-manipulation; PARALLEL MECHANISMS; DESIGN;
D O I：
10.1016/j.rcim.2011.06.005
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
The micro-gripper is an essential device in micro-manipulation. A new micro-gripper fabrication process using MEMS technology is developed for a robotic micro-manipulation system. The mechanical stiffness of this gripper is analyzed with the Pseudo-Rigid Body Model to estimate the grip force of these micro-grippers of various scales and materials. The validity of the proposed model is verified by simulations and experiments. An experimental robotic micro-manipulation system consisting of this micro-gripper and a precision manipulator is implemented, and an actual gripping test is conducted to evaluate the robotic manipulation system. (C) 2011 Elsevier Ltd. All rights reserved.
引用
收藏
页码：50 / 56
页数：7
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